VACTRA-Pinnacle

VACTRA-Pinnacle is RAON Robotics' vacuum wafer-transfer robot for semiconductor manufacturing equipment. Its dual-arm layout uses four independently controlled hands in a scissor configuration, allowing the mechanism to move wafers between process modules and transfer chambers while maintaining the cleanliness and controlled handling required inside vacuum systems. Eight controlled axes coordinate the radial, rotational and vertical motions of the two arms.

The published geometry includes a 372-millimetre body diameter, radial reach up to 680 millimetres and 90 millimetres of vertical travel. Those dimensions define the robot's installation and handoff envelope, not the dimensions of a complete wafer-processing tool. End effectors, chamber arrangement, motion recipes and system-level interlocks remain part of the equipment integration. The Pinnacle record refers to the exact vacuum-transfer model and should not be treated as evidence for atmospheric handling or unrelated RAON robot families.