VACTRA-Q

VACTRA-Q is RAON Robotics' seven-axis transfer robot for moving wafers inside high-vacuum semiconductor process equipment. Its cylindrical body measures 312 millimetres in diameter and 935 millimetres high, with an R-axis stroke reaching 960 millimetres centre-to-centre, 330 degrees of T-axis travel and 150 millimetres of vertical movement.

Four link-type arm modules can be controlled independently, allowing equipment designers to sequence wafer movements between multiple chambers around the robot. RAON also specifies a patented arm structure, high repeatability and one-step position correction through its AWC function. The delivered motion programme, chamber geometry, end effectors and vacuum-compatible integration determine the completed handling cell.