Product profile
VACTRA-Q
VACTRA-Q is RAON Robotics' seven-axis vacuum robot for transferring semiconductor wafers in high-vacuum process environments. Its four arms can operate ind...
Facts
- Company
- Raon Robotics / 라온로보틱스
- Product type
- industrial_robot
- Status
- commercial
- Primary capability
- Transfer wafers between semiconductor process modules
- Website
- https://raonrobot.com/en/m21_1.php
About VACTRA-Q
VACTRA-Q is a seven-axis vacuum robot with four independently controlled wafer-handling arms. The compact cylindrical structure provides a long radial stroke and supports movement between several process chambers inside semiconductor equipment.
Independent arm control allows simultaneous or sequenced wafer transfer and reduces idle movement during multi-chamber processing. RAON Robotics integrates vacuum-compatible drives, encoders and controllers around customer equipment geometry and wafer-handling requirements.
Market context
industrial_robot, official_16x9_ready, Semiconductor Wafer-Transfer Robot, official_product_render, https://raonrobot.com/en/m21_1.php, industrial_robot, Semiconductor Wafer-Transfer Robot, industrial_robot, semiconductor_wafer_transfer_robot, industrial_robot
Summary
Type: Vacuum robot
Core: VACTRA-Q
Function: Wafer transfer
Audience: Chipmakers
Specifications
- axes
- 7 axes
- body_size
- Ø312 × 935 mm body
- reach_mm
- R-axis stroke up to 960 mm centre-to-centre mm
- vertical_lift_mm
- 150 mm Z-axis stroke mm
Operations
- Environment
- semiconductor_fabrication_equipment, high_vacuum
- Primary user
- Semiconductor equipment makers and fabs
- Role
- Transfer wafers between semiconductor process modules
- Interaction model
- autonomous_and_operator_supervised
- Mobility class
- stationary_industrial_robot
- Product detail
- industrial_robot, official_16x9_ready, Semiconductor Wafer-Transfer Robot, official_product_render, https://raonrobot.com/en/m21_1.php, industrial_robot, Semiconductor Wafer-Transfer Robot, industrial_robot, semiconductor_wafer_transfer_robot, industrial_robot