IMUs & inertial sensing

Measures body rotation and acceleration. State estimation combines these readings with joint feedback and external observations to track the robot’s motion.

Inside an inertial sensor

A suspended silicon mass responds to acceleration. The enlarged cutaway shows its motion beside the gyroscope, readout and circuit board.

Drag to rotate · scroll to zoom

Loading model…

Inside an inertial sensor

Select a part to see its role.

Source & model scope

Original schematic of a capacitive MEMS accelerometer within an IMU. The single-axis cutaway and amplified motion explain the sensing principle; the board layout is illustrative. Original Korthos geometry.

Analog Devices · MEMS accelerometer principle · Model scope & reuse
Architecture, materials & specificationsArchitecture options, material requirements and integration constraints

Architecture options

ApproachMechanismAdvantagesTrade-offs
IMUReports acceleration and angular rate.Fits into the robot’s own state estimator.Bias and noise accumulate when integrated without other observations.
AHRSFuses measurements into orientation.Provides a ready-to-use attitude estimate.Magnetic heading can be disturbed near motors; filter assumptions affect dynamic behaviour.
Visual / LiDAR-inertialFuses inertial measurements with observed scene features.External observations help constrain drift.Needs calibrated timing and sensor geometry; feature-poor scenes weaken the correction.
GNSS-aided INSFuses inertial measurements with satellite positioning.Adds an outdoor position reference.Satellite visibility limits indoor and obstructed operation.

Specifications & operating limits

Materials & constraints

Silicon sensing structures
MEMS devices use microscopic moving structures formed on silicon. Their motion is converted into electrical measurements.
Package & circuit board
A protected sensor package connects to readout, power and interface electronics. Board stress and mounting alignment affect the installed measurement.
Calibration
Known motion and temperature tests characterise offsets, sensitivity and axis alignment. Stored corrections compensate these repeatable errors.

Dependencies & engineering limits

Body motion & joint motion
An IMU measures the body it is attached to. Joint encoders describe the limbs relative to that body; contact estimates connect the two to the ground.
Encoders & position sensors
Mounting & vibration
Mount alignment sets the measurement axes. Structural vibration and impact can corrupt readings, while a flexible mount also changes how sensor motion relates to body motion.
Structure & materials
Timing & estimation
Timestamps place inertial readings alongside camera, joint and contact measurements. Delay or clock mismatch can make otherwise accurate signals describe different moments.
Compute & control
Manufacturing & calibration
Fabrication, packaging and board assembly establish the sensing hardware. Motion and temperature calibration then characterise each unit’s scale, bias and axis alignment.
Drift & external references
Small gyro and acceleration errors accumulate during integration. Vision, LiDAR, contact constraints or GNSS provide additional observations; each has its own operating limits.
Cameras / depth vision

Manufacturing & assembly

Guide

About this route

The route shows one process or architecture. Select a step to see its function and connections; related parts can be parallel inputs or alternatives.

Function

Inputs & dependencies
Outputs & connections
Related processes & parts
Sources

Manufacturing · Representative route. Bosch process references explain micromachining and cavity sealing.

Related parts & processes 1

Etch mask & stop layer

A patterned resist or oxide mask protects selected silicon during deep etching. A stop layer and endpoint detection control the completed trench depth.

Sources & technical scope

Illustrative images of generic materials and components.

Link to this detail

Production equipment

Market context

Bosch integrated MEMS production scale

>1bnIntegrated MEMS sensors shipped

Broad sensor production across consumer and other applications; not robot IMU shipments or inertial-sensor market share.

Livox

MEVIUS2 pairs two Livox MID-360 LiDARs with a TIER IV C1 camera and NVIDIA Jetson compute. The design uses the LiDAR/IMU input alongside camera data.

Explore documented supply relationships →